SLT-50 slurry was developed for polishing Lithium Tantalate (LiTaO3) wafers, commonly used for SAW devices.
| Standard products (Typical values) |
SLT-50 Component A |
SLT-50 Component B |
| D50 (nm) | 50 | – |
| pH | 9 – 11 | 1 – 3 |
| Dilution | 1 : 4 | 1 : 1 |
| Abrasive | Silica | None |
SLT-50 gives a superior removal rate than traditional slurries for a similar surface roughness. The slurry is supplied with component (A) and (B) and must be mixed according to the preparation instruction.
Download the technical datasheet to see application data.
You can now log in
A message will be sent to your email address.