ALN-6L – AIN substrate polishing slurry

Caractéristiques produits

Standard product (Typical values)	ALN-6L
PSD d50 (µm)	0.3
pH	2 – 3
Dilution	1 : 1
Abrasive	Alumina

Often used as a heat dissipator in integrated circuits or LED devices, aluminum nitride is well-known for its very high thermal conductivity. The grains of AlN ceramics are easily peeled off during polishing and cause void defect. We developed ALN-6L to deliver the best surface finish without void defect.

Download the technical datasheet to see application data.