SLT-50
SLT-50 slurry was developed for polishing Lithium Tantalate (LiTaO3) wafers, commonly used for SAW devices.
SLT-50 slurry was developed for polishing Lithium Tantalate (LiTaO3) wafers, commonly used for SAW devices.
| Standard products (Typical values) |
SLT-50 Component A |
SLT-50 Component B |
| D50 (nm) | 50 | – |
| pH | 9 – 11 | 1 – 3 |
| Dilution | 1 : 4 | 1 : 1 |
| Abrasive | Silica | None |
SLT-50 gives a superior removal rate than traditional slurries for a similar surface roughness. The slurry is supplied with component (A) and (B) and must be mixed according to the preparation instruction.
Download the technical datasheet to see application data.
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